BROOKS INSTRUMENT
Mass flow controller GF-100-120-125
Brooks GF-100 series offer high purity flow path, outstanding performance, reliability, and repeatability.
Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
Features:
- Long-term zero stability of <±0.5% full scale per year
- Settling times: 700 ms - <1 second
- Full-scale flow rates up to 300 slpm
- All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
- Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
- MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
- Local display
- Optional SDS gas delivery
- DeviceNetTM, RS-485 L-Protocol and analog interfaces
- For all gases up to 10bar
- Metal sealed
- Service port aids device installation, monitoring and troubleshooting
Selected variant
Specifications
| Approvals | CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) |
|---|---|
| Burst Pressure | 206 bar |
| Control range | 2-100 % (NC) 3-100 % (NO) |
| Data | RS485, DeviceNet |
| Diagnostics / Service Port | RS-485 via 2.5mm jack |
| Differential Pressure | 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid |
| External Leakage | 1x10-10 atm. cc/sec He |
| Lowest flow | 0,003 ln/min |
| Materials Wetted Parts | Stainless steel 304, Stainless steel 316, Hastelloy |
| Normally Closed Valve Closes | <1%F.S |
| Normally Open Valve Closes | < 2%F.S |
| Op. | 34 bar |
|---|---|
| Pressure Range Max | 55 bar |
| Response time | < 1 s |
| Surface Finish | 10 µm Ra |
| Temperature range from | 10 °C |
| Temperature range of media from | 10 °C |
| Temperature range of media to | 50 °C |
| Temperature range to | 50 °C |
| Valve type | NC/NO |
Product description
Brooks GF-100 series offer high purity flow path, outstanding performance, reliability, and repeatability.
Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
Features:
- Long-term zero stability of <±0.5% full scale per year
- Settling times: 700 ms - <1 second
- Full-scale flow rates up to 300 slpm
- All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
- Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
- MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
- Local display
- Optional SDS gas delivery
- DeviceNetTM, RS-485 L-Protocol and analog interfaces
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