Brooks GF-100 series offer high purity flow path, outstanding performance, reliability, and repeatability.
Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
Thermal Mass Flow Controller GF-100
|Approvals||CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)|
|Burst Pressure||200 bar|
|Control range||2-100 % (NC) 3-100 % (NO)|
|Diagnostics / Service Port||RS485 (2,5mm plug)|
|Differential Pressure||3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid|
|Distance Max||3 m|
|External Leakage||1x10-11 atm. ml/s H2|
|Flow range max||0,003-50 ln/min|
|Materials Wetted Parts||Stainless steel 304, Stainless steel 316, Hastelloy|
|Normally Closed Valve Closes||<1%F.S|
|Normally Open Valve Closes||2%F.S|
|Pressure Range Max||47 bar|
|Response time||< 1 s|
|Surface Finish||0,4 µm Ra|
|Temperature range from||10 °C|
|Temperature range to||50 °C|
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