BROOKS INSTRUMENT
Brooks GF-100 series offer high purity flow path, outstanding performance, reliability, and repeatability.
Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
Features:
Articles | Approvals | Burst Pressure | Control range | Data | Diagnostics / Service Port | Differential Pressure | Differential Pressure Max | Differential Pressure Min | External Leakage | Lowest flow | Materials Wetted Parts | Normally Closed Valve Closes | Normally Open Valve Closes | Op. | Pressure Range Max | Response time | Surface Finish | Temperature range from | Temperature range of media from | Temperature range to | Valve type |
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GF-100
Thermal Mass Flow Controller GF-100
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CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) | 206 bar | 2-100 % (NC) 3-100 % (NO) | RS485, DeviceNet | RS-485 via 2.5mm jack | 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid | 1x10-10 atm. cc/sec He | 0,003 ln/min | Stainless steel 304, Stainless steel 316, Hastelloy | <1%F.S | < 2%F.S | 34 bar | 55 bar | < 1 s | 10 µm Ra | 10 °C | 10 °C | 50 °C | NC/NO | ||
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GF101
Thermal Mass Flow Controller GF101
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206 bar | 5-100% (Normally Closed Valve) | RS485, DeviceNet | RS-485 via 2.5mm jack | 30-90 psid | 1x10-10 atm. cc/sec He | 55 ln/min | Hastelloy, Stainless steel 304, Stainless steel 316 | < 2%F.S | N/A | 10 bar | 55 bar | <1 s | 10 µm Ra | 10 °C | 10 °C | 50 °C | NC | |||
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GF-120
Thermal Mass Flow Controller GF-120
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CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) | 206 bar | 2-100 % (NC) 3-100 % (NO) | RS485, DeviceNet | RS-485 via 2.5mm jack | 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid | 1x10-10 atm. cc/sec He | 0,003 ln/min | Stainless steel 304, Stainless steel 316, Hastelloy | <1%F.S | < 2%F.S | 34 bar | 55 bar | < 1 s | 5 µm Ra | 10 °C | 10 °C | 50 °C | NC/NO | ||
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GF-125
Thermal Mass Flow Controller GF-125
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CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) | 34 bar | 2-100 % (NC) 3-100 % (NO) | RS485, DeviceNet | RS-485 via 2.5mm jack | 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid | 1x10-10 atm. cc/sec He | 0,003 ln/min | Stainless steel 304, Stainless steel 316, Hastelloy | <1%F.S | < 2%F.S | 7 bar | 11 bar | 300 ms (3-860 mln/min, 400 ms (861-7 200 mln/min),500 ms (7 201-30 000 mln/min), < 700 ms (30 001-55 000 mln/min) | 5 µm Ra | 10 °C | 10 °C | 50 °C | NC/NO | ||
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GF81
Thermal Mass Flow Controller GF81
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CE, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing), RoHS | 5-100% | 6,2 bar | 2 bar | 1x10-10 cc/sek (He) | 51-300sl/m | 5 bar | 10 bar | <1 s | 0,6 µm Ra | 5 °C | 50 °C | |||||||||
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GF100
Thermal Mass Flow Controller GF100
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34,5 bar | <1 s | |||||||||||||||||||
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GF120
Thermal Mass Flow Controller GF120
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34,5 bar | <1 s | |||||||||||||||||||
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GF120XSL
Thermal Mass Flow Controller GF120XSL
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34 bar | 2-100 % (NC) 3-100 % (NO) | RS485, DeviceNet | RS-485 via 2.5mm jack | 10 Torr-30 psid typical (1.33-207 kPa typical) | 1x10-10 atm. cc/sec He | 0.004 ln/min | Hastelloy, Stainless steel 304, Stainless steel 316 | <1%F.S | < 2%F.S | 34 bar | 34,5 bar | <3 s | 5 µm Ra | 10 °C | 10 °C | 50 °C | NC/NO | |||
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GF120XSD
Thermal Mass Flow Controller GF120XSD
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34 bar | 2-100 % (NC) 3-100 % (NO) | RS485, DeviceNet | RS-485 via 2.5mm jack | 10 Torr-30 psid typical (1.33-207 kPa typical) | 1x10-10 atm. cc/sec He | > 0.025 ln/min | Hastelloy, Stainless steel 304, Stainless steel 316 | <1%F.S | < 2%F.S | 34 bar | 34,5 bar | <3 s | 5 µm Ra | 10 °C | 10 °C | 50 °C | NC/NO | |||
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GF121
Thermal Mass Flow Controller GF121
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206 bar | 5-100% (Normally Closed Valve) | RS485, DeviceNet | RS-485 via 2.5mm jack | 30-90 psid | 1x10-10 atm. cc/sec He | 55 ln/min | Hastelloy, Stainless steel 304, Stainless steel 316 | < 2%F.S | N/A | 10 bar | 48 bar | <1 s | 5 µm Ra | 10 °C | 10 °C | 50 °C | NC | |||
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GF125
Thermal Mass Flow Controller GF125
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10 bar | <1 ,5s | |||||||||||||||||||
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GF126
Thermal Mass Flow Controller GF126
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34 bar | 5-100% (Normally Closed Valve) | RS485, DeviceNet | RS-485 via 2.5mm jack | 30-90 psid | 1x10-10 atm. cc/sec He | 55 ln/min | Hastelloy, Stainless steel 304, Stainless steel 316 | < 2%F.S | N/A | 10 bar | 11 bar | <1 s | 5 µm Ra | 10 °C | 10 °C | 50 °C | NC | |||
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GF135
Thermal Mass Flow Controller GF135
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6,9 bar | <400 ms |
Approvals | CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) |
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Burst Pressure | 206 bar |
Control range | 2-100 % (NC) 3-100 % (NO) |
Data | RS485, DeviceNet |
Diagnostics / Service Port | RS-485 via 2.5mm jack |
Differential Pressure | 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid |
External Leakage | 1x10-10 atm. cc/sec He |
Lowest flow | 0,003 ln/min |
Materials Wetted Parts | Stainless steel 304, Stainless steel 316, Hastelloy |
Normally Closed Valve Closes | <1%F.S |
Normally Open Valve Closes | < 2%F.S |
Op. | 34 bar |
Pressure Range Max | 55 bar |
Response time | < 1 s |
Surface Finish | 10 µm Ra |
Temperature range from | 10 °C |
Temperature range of media from | 10 °C |
Temperature range of media to | 50 °C |
Temperature range to | 50 °C |
Valve type | NC/NO |