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BROOKS INSTRUMENT

BROOKS INSTRUMENT

Mass flow controller GF-100-120-125

  • For all gases up to 10bar
  • Elastomer sealed
  • Service port aids device installation, monitoring and troubleshooting

Product description

Brooks GF-100 series offer high purity flow path, outstanding performance, reliability, and repeatability.

 

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

 

Features:

 

  • Long-term zero stability of <±0.5% full scale per year
  • Settling times: 700 ms - <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures 
  • MultiFloTM gas and range programmability—one  device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Local display
  • Optional SDS gas delivery
  • DeviceNetTM, RS-485 L-Protocol and analog interfaces

 

Variants

Articles Approvals Burst Pressure Control range Data Diagnostics / Service Port Differential Pressure Differential Pressure Max Differential Pressure Min Distance Max External Leakage Flow range max Materials Wetted Parts Normally Closed Valve Closes Normally Open Valve Closes Op. Pressure Range Max Response time Surface Finish Temperature range from Temperature range of media to Temperature range to Valve type
CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) 200 bar 2-100 % (NC) 3-100 % (NO) RS485, DeviceNet RS485 (2,5mm plug) 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid 3 m 1x10-11 atm. ml/s H2 0,003-50 ln/min Stainless steel 304, Stainless steel 316, Hastelloy <1%F.S 2%F.S 34 bar 47 bar < 1 s 0,4 µm Ra 10 °C 50 °C NC
CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) 200 bar 2-100 % (NC) 3-100 % (NO) RS485, DeviceNet RS485 (2,5mm plug) 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid 3 m  1x10-11 atm. ml/s H2 0,003-50 ln/min Stainless steel 304, Stainless steel 316, Hastelloy <1%F.S 2%F.S 34 bar 47 bar < 1 s 0,4 µm Ra 10 °C 50 °C NC
CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) 34 bar 2-100 % (NC) 3-100 % (NO) RS485, DeviceNet RS485 (2,5mm plug) 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid 3 m  1x10-11 atm. ml/s H2 0,003-50 ln/min Stainless steel 304, Stainless steel 316, Hastelloy <1%F.S 2%F.S 7 bar 10 bar 300 ms (3-860 mln/min, 400 ms (861-7 200 mln/min),500 ms (7 201-30 000 mln/min), < 700 ms (30 001-55 000 mln/min) 0,1 µm Ra 10 °C 50 °C NC
CE, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing), RoHS 5-100% 6,2 bar 2 bar 1x10-10 cc/sek (He) 51-300sl/m 5 bar 10 bar <1 s 0,6 µm Ra 5 °C 50 °C 50 °C
34,5 bar <1 s 50 °C
34,5 bar <1 s 50 °C
34,5 bar <1 s 50 °C
34,5 bar <3 s 50 °C
34,5 bar <3 s 50 °C
34,5 bar <1 s 50 °C
10 bar <1 ,5s 50 °C
10 bar 50 °C
6,9 bar <400 ms 50 °C

Variant

GF-100

GF-100
Thermal Mass Flow Controller GF-100

spinner

Specifications

Approvals CE, RoHS, SEMI F20 kompatibel, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Burst Pressure 200 bar
Control range 2-100 % (NC) 3-100 % (NO)
Data RS485, DeviceNet
Diagnostics / Service Port RS485 (2,5mm plug)
Differential Pressure 3-860 mln/min = 7-45 psid, 861-7 200 mln/min = 10-45 psid, 7 201-55000 mln/min = 15-45 psid
Distance Max 3 m
External Leakage 1x10-11 atm. ml/s H2
Flow range max 0,003-50 ln/min
Materials Wetted Parts Stainless steel 304, Stainless steel 316, Hastelloy
Normally Closed Valve Closes <1%F.S
Normally Open Valve Closes 2%F.S
Op. 34 bar
Pressure Range Max 47 bar
Response time < 1 s
Surface Finish 0,4 µm Ra
Temperature range from 10 °C
Temperature range to 50 °C
Valve type NC
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