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Mass flow controller GF40

  • For all gases up to 10bar
  • Elastomer sealed
  • Service port aids device installation, monitoring and troubleshooting

Product description

Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.




  • Programmable multi-gas/multi-range capabilities
  • Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
  • Sub-1 second flow response time and accuracy of 1% set point for demanding applications
  • Well suited for a variety of gases
  • Fast response, Hastelloy sensor
  • Easily accessible diagnostic service port is independent of tool communication
  • Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface





Thermal Mass Flow Controller GF-40

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Approvals CE, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing), RoHS
Burst Pressure 275 bar
Control range 2-100 %
Data RS485 (HART), DeviceNet, Profibus, EtherCat
Diagnostics / Service Port Diagnostic/Service Port: RS485 via 2.5 mm jack
Differential Pressure 3-860 mln/min = 0,5-3 bar, 861-7200 mln/min = 1-3bar, 7201-55000 mln/min = 1,7-3bar
Differential Pressure Max 3 bar
Differential Pressure Min 0,5 bar
External Leakage 1x10-9 atm. cc/sec He
Lowest flow 0,003-50 ln/min N2
Material of seals Buna, EPDM, Kalrez, Neoprene, Viton
Materials Wetted Parts Hastelloy, Stainless steel 17-7 PH, Stainless steel 316, Stainless steel 430
Op. 10 bar
Pressure Range Max 10 bar
Response time < 1 s
Surface Finish 32 µm Ra
Temperature range from 5 °C
Temperature range of media from 5 °C
Temperature range of media to 50 °C
Temperature range to 50 °C
Valve type NC/NO
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