BROOKS INSTRUMENT
Mass flow controller GF40
Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
Features:
- Programmable multi-gas/multi-range capabilities
- Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
- Sub-1 second flow response time and accuracy of 1% set point for demanding applications
- Well suited for a variety of gases
- Fast response, Hastelloy sensor
- Easily accessible diagnostic service port is independent of tool communication
- Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
- For all gases up to 10bar
- Elastomer sealed
- Service port aids device installation, monitoring and troubleshooting
Selected variant
Specifications
| Approvals | CE, EN61010-1, EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing), RoHS |
|---|---|
| Burst Pressure | 275 bar |
| Control range | 2-100 % |
| Data | RS485 (HART), DeviceNet, Profibus, EtherCat |
| Diagnostics / Service Port | Diagnostic/Service Port: RS485 via 2.5 mm jack |
| Differential Pressure | 3-860 mln/min = 0,5-3 bar, 861-7200 mln/min = 1-3bar, 7201-55000 mln/min = 1,7-3bar |
| Differential Pressure Max | 3 bar |
| Differential Pressure Min | 0,5 bar |
| External Leakage | 1x10-9 atm. cc/sec He |
| Lowest flow | 0,003-50 ln/min N2 |
| Material of seals | Buna, EPDM, Kalrez, Neoprene, Viton |
| Materials Wetted Parts | Hastelloy, Stainless steel 17-7 PH, Stainless steel 316, Stainless steel 430 |
|---|---|
| Op. | 10 bar |
| Pressure Range Max | 10 bar |
| Response time | < 1 s |
| Surface Finish | 32 µm Ra |
| Temperature range from | 5 °C |
| Temperature range of media from | 5 °C |
| Temperature range of media to | 50 °C |
| Temperature range to | 50 °C |
| Valve type | NC/NO |
Product description
Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
Features:
- Programmable multi-gas/multi-range capabilities
- Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
- Sub-1 second flow response time and accuracy of 1% set point for demanding applications
- Well suited for a variety of gases
- Fast response, Hastelloy sensor
- Easily accessible diagnostic service port is independent of tool communication
- Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
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